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When I was Etch process engineer in Holtek fab ( merged by UMC), what we did to clean equipments were " flush" and " purge". For chemical stations ( H2SO4+H2O2, Hot H3PO4, BOE.....etc), using D.I. water to do QDR( Quick Dump Rinse) and clean pipelines or tubes. A lot of water is must. After PM (Preventive Maintainese), we measured water resistivity. Higher is better. When pass the spec ( specification), the chemical station will key to " Operation". 

So, how we treat our body, do we drink a lot of water to clean our boby? it is a very interesting question. 

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